@Article{MarcianoMarBonCorTra:2009:UsNeAt,
author = "Marciano, Fernanda Roberta and Marcuzzo, J. S. and Bonetti, L. F.
and Corat, Evaldo Jos{\'e} and Trava-Airoldi, Vladimir Jesus",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Tecnol{\'o}gico de Aeron{\'a}utica (ITA)} and {Clorovale
Diamantes Ind{\'u}stria e Com{\'e}rcio Ltda} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)}",
title = "Use of near atmospheric pressure and low pressure techniques to
modification DLC film surface",
journal = "Surface and Coatings Technology",
year = "2009",
volume = "204",
number = "1/2",
pages = "64--68",
month = "Sept.",
keywords = "Diamond-like carbon, Oxygen plasma etching, Wetting contact
angle.",
abstract = "Diamond-like carbon (DLC) films have been use in numerous
industrial applications due to its mechanical properties such as
low friction coefficient, high hardness, and high adherence on
different substrate materials. It has been demonstrated that the
DLC surface can be modified with oxygen plasma treatment. The
purpose of this paper is to study two kinds of surface treatments
(atmospheric and low pressures) using oxygen gas for different
etching exposure times in DLC films. Plasma durability along the
time was also evaluated. DLC films were deposited using plasma
enhanced chemical vapor deposition technique. The properties of
DLC treated for both techniques in different exposure times were
investigated through Raman, AFM and contact angle measurements. D
band position slightly shifts toward lower wave numbers after
oxygen plasma etching treatment whilst the surface becomes
rougher, although the roughness values are still lower. A
conventional wetting contact angle method was used to study the
surface properties of DLC films with different treatments. The
wetting contact angle reduced significantly due to the increase of
carbonoxygen sites on the surface.",
doi = "10.1016/j.surfcoat.2009.06.049",
url = "http://dx.doi.org/10.1016/j.surfcoat.2009.06.049",
issn = "0257-8972",
language = "en",
targetfile = "use of near.pdf",
urlaccessdate = "20 maio 2024"
}